Wet etching fabrication of photonic quantum ring laser
نویسندگان
چکیده
منابع مشابه
Fabrication of inverted pyramidal pits with Nano-opening by laser interference lithography and wet etching
Article history: Received 29 March 2016 Received in revised form 7 June 2016 Accepted 20 June 2016 Available online 21 June 2016 In this work we demonstrate a fabrication process for three-dimensional (3D) container, which is composed of inverted pyramidal pit (IPP) and a capwith nanosized opening fabricated by combining laser interference lithography and anisotropic wet etching processes. The ...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2004
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.1786346